Patent · US Active

Acceleration sensor having spring force compensation

US10168351B2 · kind B2 · utility

0Cited by

7References

10Claims

0Family size

Assignee

NORTHROP GRUMMAN LITEF GMBH · DE

Inventors

Stefan Koenig · Lorsch, DE
Peter Leinfelder · Ehrenkirchen, DE

Key dates

Filing date	Jan 27, 2016
Grant date	Jan 1, 2019
Priority date	—
Expiry date	Jan 27, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0882
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, an electrostatic force acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.