Self-alignment for apparatus comprising photonic device

US10168497B2 · kind B2 · utility

Assignee

• RWTH Aachen · DE

Inventors

• Florian Merget · Aachen, DE
• Jeremy Witzens · Aachen, DE
• Alvaro Moscoso-Martir · Aachen, DE

Key dates

• Filing date: Jun 15, 2015
• Grant date: Jan 1, 2019
• Expiry date: Jun 15, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/136
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An apparatus may include a photonic device with at least a first waveguide having a light-conducting core bounded by at least one cladding layer, at least a second waveguide having a light-conducting core bounded by at least one cladding layer, wherein the first waveguide is aligned to couple with the second waveguide, wherein alignment of the first waveguide with the second waveguide with respect to at least one axis C coincides with at least one stop area of the photonic device resting on a stop surface of a corresponding support structure on a substrate, wherein the stop area is a stop in a recess from a surface of the photonic device. A method to fabricate the apparatus may include the recess is formed by etching of the photonic device, and/or the support structure is formed by etching of the substrate.