Method for scanning along a continuous scanning trajectory with a scanner system
US10168598B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2012 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Dec 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/16
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to a method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterized by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12′) of the first pair of deflectors (10) and in the deflectors (22, 22′) of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.