Patent · US Active

Optical filter array

US10170509B2 · kind B2 · utility

10Cited by
2References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 9, 2017
Grant dateJan 1, 2019
Priority date—
Expiry dateFeb 9, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2003/2826
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.