Mask and method for manufacturing the same
US10173240B2 · kind B2 · utility
3Cited by
0References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 7, 2016 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Jun 21, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides a mask having a plurality of elongate openings formed in a substrate, including: a plurality of reinforcement portions having a thickness smaller than a thickness of the substrate and bridging the openings across a longitudinal direction thereof on one side of the substrate; and a recess portion having a step formed by excavating an area around the openings on each side of the reinforcement portions along the longitudinal direction. The mask accordingly achieves and retains high mechanical strength without increasing the mask thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.