Method for determining a pressure measurement signal, and a pressure measurement arrangement for same

US10175129B2 · kind B2 · utility

Assignee

• VEGA Grieshaber KG · DE

Inventors

• Jörn Jacob · Wolfach, DE
• Bernhard Weller · Wolfach, DE

Key dates

• Filing date: Oct 17, 2014
• Grant date: Jan 8, 2019
• Expiry date: Jan 28, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L27/002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method for determining a pressure measurement signal in a capacitive pressure measurement cell which comprises a main body and a measurement membrane that is arranged on the front of said main body. Electrodes are arranged on said main body and measurement membrane and form a measurement capacitance in a region of the measurement membrane which has a high degree of pressure sensitivity, and form a reference capacitance in a region of the measurement membrane which has a lower degree of pressure sensitivity, said measurement capacitance and reference capacitance being determined independently of one another, the pressure measurement signal being determined in a first measurement range from the measurement capacitance and the reference capacitance, in accordance with the first evaluation, and said pressure measurement signal being determined in a second measurement range from the reference capacitance in accordance with a second evaluation.