System for determining the position of a test object
US10175141B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 22, 2015 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Jul 5, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/62
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a system for determining the position of a test object comprising the following features: an autocollimation telescope having a beam source for emitting a beam; a beam splitter; a detector unit and an objective lens; and an optical element embodied as a focusing device, wherein the test object, the beam source and the focusing device are arranged along a common optical axis (z), and a control device for controlling the focusing device, which is designed in such a way that the beam can be focused onto a center of curvature of a first test surface of the test object with the coordinates (x1, y1) and at least onto a center of curvature of a second test surface of the test object with coordinates (x2, y2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.