Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theory
US10175160B1 · kind B1 · utility
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Key dates
| Filing date | Apr 20, 2018 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Apr 20, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.