System and method for analyzing a gas
US10175212B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Dec 2, 2014 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Mar 15, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.