MEMS-based levers and their use for alignment of optical elements
US10175433B2 · kind B2 · utility
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16References
10Claims
0Family size
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Key dates
| Filing date | May 26, 2017 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | May 26, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0118
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.