Micromirror array and method for the manufacture thereof
US10175473B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2015 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | May 29, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micromirror array is provided having a mirror membrane, including a first supporting element, including for each first supporting element, a first coupling element that is located between the mirror membrane and the particular first supporting element and is formed to mechanically couple the particular first supporting element to the mirror membrane; having at least one second supporting element that is mechanically coupled to the at least one first supporting element; and having a second coupling element for each second supporting element that is formed to be mechanically contacted. Also a method for manufacturing a micromirror array according to the present inventions described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.