Solid immersion microscopy system with deformable mirror for correction of aberrations
US10175476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2013 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Feb 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system and method for correction of aberrations in a solid immersion microscopy system using a deformable mirror. A solid immersion lens is provided having a surface configured to make optical contact with a nearly planar surface of a substrate, an object to be imaged disposed on the opposite side of the substrate. A convex surface of the solid immersion lens faces an objective lens. A deformable mirror assembly, including a plurality of individually controllable actuators, receives light transmitted from the object. A control system controls in communication with the deformable mirror assembly provides individual actuation of each of the actuators of the deformable mirror to compensate or counteract the effects of aberrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.