Method for forming color filter array, method for manufacturing imaging apparatus, and imaging apparatus
US10178286B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Aug 27, 2015 |
| Grant date | Jan 8, 2019 |
| Priority date | — |
| Expiry date | Jun 13, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.