Patent · US Active

Transfer head array

US10179731B2 · kind B2 · utility

0Cited by

8References

20Claims

0Family size

Assignee

MIKRO MESA TECHNOLOGY CO., LTD. · WS

Inventors

Li-Yi Chen · Tainan, TW
Shih-Chyn Lin · Tainan, TW
Hsin-Wei Lee · Ji'an, TW
Pei-Yu Chang · Tainan, TW

Key dates

Filing date	Aug 17, 2015
Grant date	Jan 15, 2019
Priority date	—
Expiry date	Mar 24, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C99/002
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A transfer head array includes a base substrate, an interlayer isolation layer, plural transfer heads, and at least one shielding layer. The interlayer isolation layer is disposed on the base substrate, and the interlayer isolation layer has a flat top surface facing away from the base substrate. The transfer heads are arranged on the interlayer isolation layer. The shielding layer is disposed in the interlayer isolation layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.