Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

US10180324B2 · kind B2 · utility

Assignees

• STMicroelectronics SA
• STMICROELECTRONICS, INC. · US
• STMicroelectronics International N.V. · NL

Inventors

• Carlo Valzasina · Gessate, IT
• Huantong Zhang · Coppell, US
• Matteo Fabio Brunetto · Legnano, IT
• Gert Andersson · Lindome, SE
• Erik Daniel Svensson · Gothenburg, SE
• Nils Hedenstierna · Mölndal, SE

Key dates

• Filing date: Jun 29, 2016
• Grant date: Jan 15, 2019
• Expiry date: Jan 26, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.