Patent · US Active

End block arrangement and socket arrangement

US10181393B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

VON ARDENNE Asset GmbH & Co KG · DE

Inventors

Sebastian Siegert · Dresden, DE
Gerit Stude · Dresden, DE
Gerd Arnold · Leipzig, DE
Hans-Juergen Heinrich · Ennepetal, DE
Florian Wiegand · Dresden, DE

Key dates

Filing date	Oct 20, 2015
Grant date	Jan 15, 2019
Priority date	—
Expiry date	Jun 15, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/34
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

According to various embodiments, a socket arrangement for holding an end block on a process chamber may include the following: a first socket element with a first fastening arrangement for fastening the first socket element on a process chamber wall and with a second fastening arrangement; and a second socket element with a third fastening arrangement, for fastening the second socket element on the first socket element and with a fourth fastening arrangement for fastening an end block on the second socket element; wherein the second fastening arrangement of the first socket element and the third fastening arrangement of the second socket element may be formed for engaging in one another with play in such a way that the second socket element may be deflectable in relation to the first socket element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.