Widely tunable cavity filter using low voltage, large out-of-plane actuation MEMS
US10181837B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Sep 23, 2016 |
| Grant date | Jan 15, 2019 |
| Priority date | — |
| Expiry date | Jan 27, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03J2200/39
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
The present application is directed to a tunable filter system. The system includes a resonator having an inner wall surrounding a cavity. The resonator includes a MEMS device positioned in the cavity including a substrate, a movable plate and a thermal actuator. The thermal actuator is has a first end coupled to the substrate and a second end coupled to the plate. The actuator moves the plate between a first and a second position in relation to the substrate. The application is also directed to a method for operating the tunable filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.