Manufacturing method of micro-electro-mechanical systems device
US10183856B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Jan 15, 2018 |
| Grant date | Jan 22, 2019 |
| Priority date | — |
| Expiry date | Jan 15, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/035
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A manufacturing method for a Micro-Electro-Mechanical Systems (MEMS) structure includes implementing a surface modification process, to form a transformation layer on the surfaces of the MEMS structure; implementing an anti-stiction coating pre-clean process, to clean the transformation layer on the surfaces towards a particular direction; and implementing an anti-stiction coating process, to coat a monolayer on the surfaces of the MEMS structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.