Door for closing a chamber opening in a chamber wall of a vacuum chamber

US10184291B2 · kind B2 · utility

Assignee

• VAT Holding AG · CH

Inventor

• Thomas Blecha · Feldkirch, AT

Key dates

• Filing date: Dec 4, 2015
• Grant date: Jan 22, 2019
• Expiry date: Dec 4, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67126
• WIPO field: Civil engineering
• WIPO sector: Other fields

Abstract

A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing. The rod is guided out of the inner space in a sealed manner.