Vibration isolation system
US10184539B2 · kind B2 · utility
10Cited by
18References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2015 |
| Grant date | Jan 22, 2019 |
| Priority date | — |
| Expiry date | Dec 23, 2035 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F7/1011
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Apparatus and methods to reduce unwanted motion in a payload of a precision instrument are described. The payload may be supported by an intermediate mass. A feedback signal based upon sensed motion of the intermediate mass may be applied to an intermediate-mass actuator arranged to drive the intermediate mass. Additionally, a feedforward signal may be applied to a payload actuator arranged to drive the payload and used to suppress unwanted motion of the payload. The feedforward signal may be derived from a source within the apparatus or external to the apparatus that would otherwise cause unwanted motion of the payload.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.