Apparatus and method for determining properties of a laser beam

US10184828B2 · kind B2 · utility

Assignee

• Primes GmbH Messtechnik für die Produktion mit Laserstrahlung · DE

Inventors

• Reinhard Kramer · Pfungstadt, DE
• Otto Maerten · Dreieich, DE
• Stefan Wolf · Schwieberdingen, DE

Key dates

• Filing date: Mar 17, 2016
• Grant date: Jan 22, 2019
• Expiry date: Mar 17, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2001/4261
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for the determination of geometric parameters of a laser beam, such as, for example, the beam diameter or the focus diameter. The apparatus includes a device for the emission of a laser beam into an active region, a detector arrangement, which can be positioned in the active region, a device for the provision of a relative movement between the laser beam and the detector arrangement, and a device for the registration and evaluation of a temporally varying signal of the detector arrangement. The detector arrangement includes at least one light guide, at least two flight-diffusing structures, and at least one light-sensitive sensor. The light guide has a light-emitting surface and a light-conducting region, with an elongated shape. The at least two light-diffusing structures are essentially extended along two different directions.