Nanostructured vanadium oxide uncooled bolometers and method of fabrication
US10184839B1 · kind B1 · utility
3Cited by
3References
16Claims
0Family size
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Inventors
Key dates
| Filing date | Aug 30, 2017 |
| Grant date | Jan 22, 2019 |
| Priority date | — |
| Expiry date | Aug 30, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/024
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to uncooled microbolometers which can be integrated in future thermal instruments engaged in land imaging on future observatories. The present invention includes: (1) developing and characterizing a microstructured VOx thin film, and, (2) fabricating an uncooled microbolometer array over the 8-14 micron spectral band.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.