Patent · US Active

Thin film transistor substrate and display using the same

US10186528B2 · kind B2 · utility

6Cited by
15References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 23, 2015
Grant dateJan 22, 2019
Priority date
Expiry dateSep 1, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/471

Abstract

Provided are a thin film transistor substrate and a display using the same. A thin film transistor substrate includes: a substrate, a first thin film transistor disposed at a first area of the substrate, the first thin film transistor including: a polycrystalline semiconductor layer, a first gate electrode on the polycrystalline semiconductor layer, a first source electrode, and a first drain electrode, a second thin film transistor disposed at a second area of the substrate, the second thin film transistor including: a second gate electrode, an oxide semiconductor layer on the second gate electrode, a second source electrode, and a second drain electrode, a nitride layer disposed on an area of the substrate, other than the second area, the nitride layer covering the first gate electrode, and an oxide layer disposed: over the first gate electrode and the second gate electrode, and under the oxide semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.