Thermal flow sensor
US10190899B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2014 |
| Grant date | Jan 29, 2019 |
| Priority date | — |
| Expiry date | Sep 28, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F5/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flow sensor with improved measurement accuracy is provided. The thermal flow sensor includes: an air flow rate detection element with a diaphragm having a thin-film portion in a semiconductor substrate; at least one heat generating resistor on the diaphragm; at least one temperature measuring resistor that detects temperature on each of an upstream side and a downstream side of the heat generating resistor; and a correction circuit portion that processes an output signal of the air flow rate detection element on the basis of temperature difference information of at least the two temperature measuring resistors on the upstream side and the downstream side, wherein a waveform of the output signal processed by the correction circuit portion is a waveform obtained by cutting a part of a mountain part or a valley part constituting a peak value by outputting of an arbitrary predetermined value when the peak value of the waveform exceeds the arbitrary predetermined value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.