Pressure sensor device and pressure sensor device manufacturing method
US10190929B2 · kind B2 · utility
2Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2015 |
| Grant date | Jan 29, 2019 |
| Priority date | — |
| Expiry date | Jul 24, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0627
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a pressure sensor device and method for making the same. A base member and a pressure sensor chip are joined so that a pressure receiving portion is aligned with a through hole. A pressure introduction unit and the base member are positioned and joined so that through holes thereof are continuous. The pressure introduction unit has a stepped portion in an end portion on an opened end side, and has a protruding portion protruding from the stepped portion to the base member side in an end portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.