Patent · US Active

Magnetic shielded probe card

US10191083B2 · kind B2 · utility

0Cited by

10References

16Claims

0Family size

Inventors

Ann Gabrys · Woodside, US
Mark W. Poulter · Berkeley, US

Key dates

Filing date	Mar 14, 2018
Grant date	Jan 29, 2019
Priority date	—
Expiry date	Mar 14, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2889
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card includes a mechanical support fixture having an inner aperture with a plurality of probes secured to the fixture that includes probe tips that extend into the inner aperture for contacting probe pads on die of a wafer to be probed. At least one magnetic shield includes a magnetic material that at least substantially surrounds a projected volume over an area that encloses the probe tips. The magnetic material has a relative magnetic permeability of at least 800.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.