Clamping apparatus and method of manufacturing a mask using the same
US10195628B2 · kind B2 · utility
0Cited by
7References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 2, 2016 |
| Grant date | Feb 5, 2019 |
| Priority date | — |
| Expiry date | Jun 2, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49867
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A clamping apparatus includes a clamping frame, a first guide, a clamp, a linear driver, and a pressure sensor. The first guide is disposed on the clamping frame. The clamp is slideably engaged with the first guide, the clamp being configured to linearly move along the first guide to adjust a distance between the clamp and the clamping frame. The linear driver is connected to the clamp, the linear driver being configured to cause, at least in part, linear motion of the clamp. The pressure sensor is configured to sense pressure applied to an object clamped between the clamp and the clamping frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.