Apparatus and method of manufacturing graphene film
US10196272B2 · kind B2 · utility
1Cited by
29References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2016 |
| Grant date | Feb 5, 2019 |
| Priority date | — |
| Expiry date | Jun 5, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is an apparatus and method of manufacturing a graphene film, wherein the apparatus includes a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film laminated on the base substrate; and a first lamination apparatus configured to laminate a first substrate on the graphene film, wherein the wrinkle flattening device applies a vacuum to the base substrate when the wrinkle flattening device is in contact with the base substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.