Metal-dielectric optical filter, sensor device, and fabrication method
US10197716B2 · kind B2 · utility
12Cited by
30References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2014 |
| Grant date | Feb 5, 2019 |
| Priority date | — |
| Expiry date | Aug 17, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8053
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.