Pressure sensor diaphragm with overpressure protection
US10203258B2 · kind B2 · utility
2Cited by
18References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2016 |
| Grant date | Feb 12, 2019 |
| Priority date | — |
| Expiry date | May 27, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a base having at least one high-pressure contact portion and a diaphragm positioned over the base and having an external top surface facing away from the base and internal surfaces facing the base. The internal surfaces comprising a raised perimeter surrounding an interior, a raised central boss within the interior, and a raised boss arm contiguous with and extending from the raised perimeter toward the interior. At least one of the raised boss arm and raised central boss are aligned with and contact a high-pressure contact portion of the base during an over-pressure event.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.