Multi-probe gauge for slab characterization
US10209058B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 7, 2018 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Mar 7, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present subject matter at-least provides an apparatus for characterization of a slab of a material. The apparatus comprises a plurality of frequency-domain optical-coherence tomography (FD-OCT) probes configured for irradiating the slab of material at at-least one location, and detecting radiation reflected from the slab of material or transmitted there-through. Further, a centralized actuation-mechanism is connected to the plurality of OCT probes for simultaneously actuating one or more elements in each of said OCT probes to at-least cause a synchronized detection of the radiation from the slab of material. A spectral-analysis module is provided for analyzing at least an interference-pattern with respect to each of said OCT probes to thereby determine at least one of thickness and topography of the slab of the material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.