Optical measurement of thin films
US10209129B2 · kind B2 · utility
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6References
20Claims
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Key dates
| Filing date | Jan 5, 2018 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Jan 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of measurement apparatus for measuring the optical properties of a sample film are described. The measurement apparatus includes a first stage, a second stage, and an arm structure coupled to the second stage. The first stage includes an optical source and a block of transparent material. The block of transparent material includes a surface that supports a sample film. The second stage includes a plurality of layers and an optical detector. The arm structure is designed to translate the second stage with respect to the first stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.