Patent · US Active

Integration of chip level micro-fluidic cooling in chip packages for heat flux removal

US10211127B1 · kind B1 · utility

2Cited by
26References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 19, 2017
Grant dateFeb 19, 2019
Priority date
Expiry dateMay 19, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/351
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An electronic chip package includes a base defining a fluid inlet opening for receiving pressurized fluid from a fluid source and a fluid outlet opening. A dielectric body is arranged on the base and configured to support an electronic device. The dielectric body comprises a coolant flow chamber formed in a first surface thereof, and a plurality of impingement openings formed within the coolant flow chamber. The plurality of impingement openings are in communication with the fluid inlet opening of the base for generating a plurality of fluid streams to be expelled into the coolant flow chamber. The body further comprises a coolant return port formed within the coolant flow chamber and in communication with the fluid outlet opening of the base.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.