X-ray detector having a capacitance-optimized light-tight pad structure
US10211249B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2016 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Jun 3, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/16146
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An x-ray detector includes a substrate including an electrically conductive connection between a read-out contact in the region of the top side of the substrate and an input of a pre-amplifier in an active layer of an integrated circuit. A first electrically conductive connection is provided between the read-out contact and a second electrically conductive connection. A surface of a first light protection is relatively larger than a surface of a light-permeable region of the first light protection. The second electrically conductive connection is provided within a second projection of the surface of the light-permeable region along the surface normal and below the second light protection. A third electrically conductive connection between the second electrically conductive connection and the pre-amplifier is provided below the second light protection. The input of the pre-amplifier is protected against direct incidence of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.