Rotation angle measuring system and machining system comprising the same
US10215558B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2016 |
| Grant date | Feb 26, 2019 |
| Priority date | — |
| Expiry date | Jun 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rotation angle measuring device includes a light source for generating a first light beam with a first polarization direction and a second light beam with a second polarization direction; a first beam splitter for splitting the first light beam and the second light beam to generate a third light beam and a fourth light beam; an image sensor for sensing a first interference pattern generated by the first and second light beams passing through a first displacement measurement module, and sensing a second interference pattern generated by the third and fourth light beams passing through a second displacement measurement module; and a processing unit for calculating two displacement values at two different positions on a measured object according to the first and second interference patterns, in order to further calculate a rotation angle of the rotation angle measuring device relative to the measured object along a first axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.