Optical waveguide structure and optical gas sensor, and methods of fabrication thereof
US10215692B2 · kind B2 · utility
1Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2015 |
| Grant date | Feb 26, 2019 |
| Priority date | — |
| Expiry date | Oct 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.