Contact inspection device having a probe head and rotation restricting portions
US10215801B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 6, 2015 |
| Grant date | Feb 26, 2019 |
| Priority date | — |
| Expiry date | Nov 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contact inspection device includes: plural probes each having a first end to be brought into contact with a test object; a probe substrate including contact portions in contact with respective second ends of the probes; a probe head through which the probes extend and which is detachably attached to the probe substrate; and plural positioning members which are provided on a surface of the probe head facing the probe substrate and through which the probes extend. Each probe has a rotation restricted portion provided on the side of the second end. Each positioning member has rotation restricting portions adapted to engage the rotation restricted portions. When the positioning members are moved relative to each other, the rotation restricting portions align the probes and switch the probes from a rotation unrestricted state to a rotation restricted state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.