Patent · US Active

Multi-level getter structure and encapsulation structure comprising such a multi-level getter structure

US10221063B2 · kind B2 · utility

0Cited by

5References

19Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

Xavier Baillin · Crolles, FR

Key dates

Filing date	Dec 11, 2015
Grant date	Mar 5, 2019
Priority date	—
Expiry date	Jan 11, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/019
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A getter structure is provided, including a support; a first layer of getter material disposed on the support a second layer of getter material, the first layer of getter material being disposed between the support and the second layer of getter material; a first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material configured to allow a circulation of gas between the first faces of the first and second layers of getter material; and a first opening crossing through at least the second layer of getter material and emerging into the first space.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.