Force detection apparatus having high sensor sensitivity
US10222281B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2015 |
| Grant date | Mar 5, 2019 |
| Priority date | — |
| Expiry date | Jul 11, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.