Merged legs and semi-flexible anchoring having cantilevers for MEMS device
US10224164B2 · kind B2 · utility
5Cited by
30References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2012 |
| Grant date | Mar 5, 2019 |
| Priority date | — |
| Expiry date | Aug 5, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0307
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.