Method for surface-modifying metal silicide, and method and apparatus for preparing trichlorosilane using surface-modified metal silicide
US10226757B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2015 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | May 15, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2523/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for preparing trichlorosilane according to an embodiment of the present invention comprises the steps of: supplying surface-modified metal silicide and metal grade silicon to a reaction unit; supplying silicon tetrachloride and hydrogen to the reaction unit; and supplying a product, which is generated by a reaction of metal grade silicon, silicon tetrachloride, and hydrogen in the presence of metal silicide in the reaction unit, to a separation unit, and separating a trichlorosilane component. In cases where a silicon tetrachloride hydrochlorination reaction is performed using the method for preparing trichlorosilane according to the embodiment of the present invention, the yield of trichlorosilane can be raised.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.