Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression
US10228389B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2015 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Dec 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.