Resonance MEMS mirror control system
US10228555B2 · kind B2 · utility
1Cited by
16References
29Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 6, 2016 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Sep 6, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.