Apparatus for monitoring process chamber
US10229818B2 · kind B2 · utility
2Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2016 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/51
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.