Transducer array subdicing
US10233076B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 13, 2016 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Jan 24, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/053
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Systems and techniques are provided for transducer array subdicing. A laminate material may include two laminate material flexures which each have a flexure boundary defined by a gap in the piece of laminate material. A trench may be located between the two flexures. The trench may be defined by a removal of a portion of laminate material from the piece of laminate material. A second trench may be on an opposite surface of the piece of laminate material from the trench. The second trench may be partially aligned with the trench. The trench and the second trench may result from the removal of laminate material from the piece of laminate material to a depth of 20% to 60% of the thickness of the piece of laminate material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.