Bolometer and method for measurement of electromagnetic radiation
US10234332B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2016 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Feb 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bolometer (10) comprises a first and a second suspension beam (12, 13) and a semiconductor portion (11) that is suspended by the first and the second suspension beam (12, 13) and comprises a first region (17) of a first conductivity type and a second region (18) of a second conductivity type. The first region (17) comprises a first triangle (21) or at least two stripes (40, 41) or islands (60, 61) which each contribute to a non-short-circuited diode (20) with the second region (18).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.