Electromagnetic wave detector, electromagnetic wave detector array, and gas analyzing apparatus
US10234379B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2016 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Mar 25, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/258
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic wave detector that selectively detects electromagnetic waves of wavelength λA includes a temperature detection unit that includes: a substrate including a cavity portion; a wavelength selection structure that generates a surface plasmon resonance with an electromagnetic wave of a predetermined wavelength λA for converting to heat and absorbing, and a detection film that detects the absorbed heat; and a support structure that retains the temperature detection unit above the cavity portion; wherein the support structure further includes a reflection structure that reflects the electromagnetic waves of the absorption wavelength of the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.