Method for inspecting an article and apparatus for measuring the article by multi-photon excitation technique
US10234389B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jan 17, 2017 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Jan 17, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2207/114
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for inspecting an article containing a target material is provided. A sampling position of the article is illuminated by a beam of laser light having a wavelength λ. Illumination focus to a focal point at the sampling position of the article to produce molecular excitation of the target material by simultaneous absorption of n incident photons of the beam of laser light, wherein n is equal to or greater than two. An output light exited from the article is analyzed by a detector, wherein the output light is of a wavelength range between 0.8λ and 1.2λ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.