Raman apparatus and methods
US10234395B2 · kind B2 · utility
0Cited by
10References
16Claims
0Family size
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Key dates
| Filing date | Aug 24, 2015 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Mar 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.