Thin film bulk acoustic resonator with signal enhancement
US10234425B2 · kind B2 · utility
9Cited by
4References
15Claims
0Family size
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Key dates
| Filing date | Sep 10, 2015 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Sep 27, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0426
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.